Dr. Yi-Ming Liu
at Chung Cheng Institute of Technology
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Diamond, Laser ablation, Chemical vapor deposition, Scanning electron microscopy, Excimer lasers, Carbon, Photomicroscopy, Polishing, Surface roughness, Surface finishing

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Amorphous silicon, Silicon, Excimer lasers, Laser processing, Semiconductor lasers, Laser irradiation, Thin films, Silicon films, Annealing, Solids

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Glasses, Excimer lasers, Laser ablation, Laser processing, Micromachining, Ultraviolet radiation, Zerodur, Pulsed laser operation, Polymers, Laser scattering

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