Yi-Shiang Chang
Technical Manager at Powerchip Semiconductor Manufacturing Corp
SPIE Involvement:
Publications (10)

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12052, 120520I (2022) https://doi.org/10.1117/12.2612298
KEYWORDS: Etching, Optical proximity correction, Logic, Lithography, Data modeling, Semiconducting wafers, Optical lithography, Double patterning technology

Proceedings Article | 27 March 2017 Presentation + Paper
Proceedings Volume 10146, 101460N (2017) https://doi.org/10.1117/12.2258201
KEYWORDS: Lithography, Photoresist materials, Etching, Optical proximity correction, Resolution enhancement technologies, Photomasks, Semiconductors, Source mask optimization, Double patterning technology, Semiconducting wafers, Radon, Computer simulations

Proceedings Article | 31 March 2014 Paper
Shin-Shing Yeh, Alan Zhu, James Chen, Bayram Yenikaya, Yi-Shiang Chang, Chia-Chi Lin
Proceedings Volume 9052, 90521Y (2014) https://doi.org/10.1117/12.2046059
KEYWORDS: Optical proximity correction, Nanoimprint lithography, Resolution enhancement technologies, Control systems, Logic devices, Sensors, Lithography, Image quality, Metals, Process control

Proceedings Article | 29 March 2013 Paper
Wan-Lin Kuo, Ya-Ting Chan, Meng-Feng Tsai, Yi-Shiang Chang, Chia-Chi Lin, Ming-Chien Chiu, Chun-Hsun Chen, Hung-Ming Wu, Mao-Hsing Chiu
Proceedings Volume 8682, 86821G (2013) https://doi.org/10.1117/12.2011434
KEYWORDS: Etching, Chemical reactions, Scanning electron microscopy, Optical lithography, Image processing, Double patterning technology, Photoresist processing, Lithography, Photomasks, Process control

Proceedings Article | 16 April 2011 Paper
Meng-Feng Tsai, Yang-Liang Li, Chan-Tsun Wu, Yi-Shiang Chang, Chia-Chi Lin
Proceedings Volume 7972, 79721B (2011) https://doi.org/10.1117/12.879316
KEYWORDS: Photomasks, Photoresist processing, Double patterning technology, Semiconducting wafers, Lithography, Printing, Etching, Critical dimension metrology, Line width roughness, Optical alignment

Showing 5 of 10 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top