Yi-Shiang Chang
Technical Manager at Powerchip Technology Corp
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Semiconductors, Lithography, Radon, Etching, Computer simulations, Photoresist materials, Photomasks, Double patterning technology, Source mask optimization, Optical proximity correction, Semiconducting wafers, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Sensors, Metals, Control systems, Image quality, Process control, Logic devices, Optical proximity correction, Nanoimprint lithography, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Lithography, Optical lithography, Etching, Image processing, Scanning electron microscopy, Process control, Photomasks, Double patterning technology, Chemical reactions, Photoresist processing

PROCEEDINGS ARTICLE | April 16, 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Etching, Printing, Photomasks, Line width roughness, Double patterning technology, Optical alignment, Critical dimension metrology, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | March 23, 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Light sources, Logic, Optical lithography, Lithographic illumination, Seaborgium, Imaging systems, Photomasks, Source mask optimization, Excel

PROCEEDINGS ARTICLE | April 3, 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Electron beam lithography, Etching, Metals, Manufacturing, Computer simulations, Photomasks, Double patterning technology, Optical proximity correction, Electronic design automation

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top