Mr. Yi Wei Xu Profile

Yi Wei Xu

at Univ of New South Wales

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 30 December 2008 Paper

Wet anisotropic etching by TMAH with NCW-1002 surfactant on crystalline silicon surface

Yi Wei Xu, Aron Michael, Chee Yee Kwok

Proceedings Volume 7269, 72690U (2008) https://doi.org/10.1117/12.810451

KEYWORDS: Etching, Silicon, Anisotropic etching, Semiconducting wafers, Surface roughness, Atomic force microscopy, Crystals, Mirrors, Electrical engineering, Wet etching

Read Abstract +

Proceedings Article | 9 January 2008 Paper

Fabrication of smooth 45° micromirror using TMAH low concentration solution with NCW-601A surfactant on <100> silicon

Yi Wei Xu, Aron Michael, Chee Yee Kwok

Proceedings Volume 6800, 68001W (2008) https://doi.org/10.1117/12.759343

KEYWORDS: Etching, Oxides, Semiconducting wafers, Atomic force microscopy, Micromirrors, Silicon, Mirrors, Surface roughness, Wet etching, Scanning electron microscopy

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years