Dr. Yi-Yien Tsai
at DelSolar Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Data modeling, Calibration, Image processing, Error analysis, Feature extraction, Scanning electron microscopy, Photomasks, Optical proximity correction, Wafer testing, Process modeling

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