Dr. Yi Cao
at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (25)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Annealing, Directed self assembly, High volume manufacturing, Nanolithography, Thin film manufacturing, Resolution enhancement technologies, Temperature metrology

PROCEEDINGS ARTICLE | March 25, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Optical lithography, Etching, Polymers, Annealing, Silicon, Scanning electron microscopy, Directed self assembly, Line edge roughness, Photomicroscopy, Semiconducting wafers

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Polymethylmethacrylate, Cadmium, Materials processing, Manufacturing, Photoresist materials, Process control, Directed self assembly, Plasma etching, Critical dimension metrology, Polymer thin films

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Polymers, Silicon, Manufacturing, Scanning electron microscopy, Bridges, Directed self assembly, Epitaxy, Thin film coatings, Semiconducting wafers

PROCEEDINGS ARTICLE | July 9, 2015
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Lithography, Logic, Optical lithography, Data modeling, Calibration, Etching, Scanning electron microscopy, Photomasks, Directed self assembly, Double patterning technology

SPIE Journal Paper | July 2, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Etching, Scanning electron microscopy, Silicon, Inspection, Semiconducting wafers, Diffractive optical elements, Defect inspection, Thin film coatings, Directed self assembly

Showing 5 of 25 publications
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