Yi Gan
at Wuhan Rrch Inst Post & Telecom
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 31, 2005
Proc. SPIE. 5624, Semiconductor and Organic Optoelectronic Materials and Devices
KEYWORDS: Etching, Dry etching, Ions, Scanning electron microscopy, Optoelectronic devices, Photomasks, Vertical cavity surface emitting lasers, Reactive ion etching, Chlorine, Anisotropic etching

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5280, Materials, Active Devices, and Optical Amplifiers
KEYWORDS: Antireflective coatings, Etching, Dry etching, Ions, Wet etching, Plasma etching, Reactive ion etching, Chlorine, Metalorganic chemical vapor deposition, Plasma

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