Dr. Yi Zhang
at National Institute of Advanced Industrial Science and Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Gold, Confocal microscopy, Metals, Temperature sensors, Finite element methods, Microfabrication, Molybdenum, Sensor technology, Temperature metrology

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Resonators, Sensors, Signal attenuation, Electrodes, Silicon, Scanning electron microscopy, Solids, Mechanical sensors

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