Mr. Yi Zheng
at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 6, 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Ferroelectric materials, Manufacturing, Signal processing, 3D metrology, Charge-coupled devices, 3D scanning, Optical scanning systems, Algorithm development, Optics manufacturing, Diffraction gratings

PROCEEDINGS ARTICLE | March 6, 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Actuators, Beam splitters, Ferroelectric materials, Sensors, Ceramics, Control systems, Optical resolution, Servomechanisms, Optical scanning systems, Diffraction gratings

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