Dr. Yi Zhou
at The Institue of Optics and Electronics
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | August 23, 2017
Proc. SPIE. 10373, Applied Optical Metrology II
KEYWORDS: Modulation, Dimensional metrology, Interferometry, Integrated circuits, Chemistry

PROCEEDINGS ARTICLE | October 25, 2016
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Modulation, Light sources, Interferometry, Light, Optical interferometry, Scanning tunneling microscopy, CCD cameras, Microfabrication, Confocal microscopy, Imaging systems

PROCEEDINGS ARTICLE | October 25, 2016
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Interferometry, Reflectometry, Thin films, Reflection, Silicon films, Silicon, Optics manufacturing, Beam splitters, Reflectivity, Fourier transforms

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top