Dr. Yi Zou
Senior Project Engineer at GLOBALFOUNDRIES Inc
SPIE Involvement:
Publications (22)

Proceedings Article | 18 March 2016 Paper
Proceedings Volume 9776, 97761W (2016) https://doi.org/10.1117/12.2219876
KEYWORDS: Directed self assembly, Extreme ultraviolet, Optical lithography, Lithography, Extreme ultraviolet lithography, Logic, Scanners, Etching, Immersion lithography, Stochastic processes, Personal protective equipment, Photomasks, Scanning electron microscopy, Metrology

Proceedings Article | 17 April 2014 Paper
Craig Higgins, Erik Verduijn, Xiang Hu, Liang Wang, Mandeep Singh, Jerome Wandell, Sohan Mehta, Jean Raymond Fakhoury, Mark Zaleski, Yi Zou, Hui Peng Koh, Pawitter Mangat
Proceedings Volume 9048, 90481Q (2014) https://doi.org/10.1117/12.2048285
KEYWORDS: Photomasks, Extreme ultraviolet, Semiconducting wafers, Extreme ultraviolet lithography, Metals, Optical lithography, Optical proximity correction, Overlay metrology, Deep ultraviolet, Inspection

Proceedings Article | 28 March 2014 Paper
Wei-Long Wang, Azat Latypov, Yi Zou, Tamer Coskun
Proceedings Volume 9049, 90491J (2014) https://doi.org/10.1117/12.2045982
KEYWORDS: Optical proximity correction, Etching, Computer simulations, Monte Carlo methods, Printing, Lithography, Detection and tracking algorithms, Optimization (mathematics), Deep ultraviolet, Directed self assembly

Proceedings Article | 28 March 2014 Paper
Proceedings Volume 9049, 904908 (2014) https://doi.org/10.1117/12.2046082
KEYWORDS: Monte Carlo methods, Atrial fibrillation, Etching, Optical lithography, Polymers, Molecules, Polymethylmethacrylate, Roentgenium, Computer simulations, Directed self assembly

Proceedings Article | 18 March 2014 Paper
Proceedings Volume 9048, 90480W (2014) https://doi.org/10.1117/12.2046341
KEYWORDS: Photomasks, 3D modeling, Optical proximity correction, Data modeling, Extreme ultraviolet, Calibration, Semiconducting wafers, Critical dimension metrology, Extreme ultraviolet lithography, Data processing

Showing 5 of 22 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top