Dr. Yifang Chen
at Rutherford Appleton Lab
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 28 November 2007
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Electron beam lithography, Etching, Silicon, Photomasks, Deep reactive ion etching, Reactive ion etching, Photoresist processing, Nanolithography, Standards development, Chemically amplified resists

Proceedings Article | 14 September 2006
Proc. SPIE. 6320, Complex Photonic Media
KEYWORDS: Metamaterials, Lithography, Electron beam lithography, Polymethylmethacrylate, Dielectrics, Silicon, Nanoimprint lithography, Silicon carbide, Nanolithography, Photonic nanostructures

SPIE Journal Paper | 1 January 2006
JM3 Vol. 5 Issue 01
KEYWORDS: Nanoimprint lithography, Silicon, Gallium arsenide, Polymethylmethacrylate, Lithography, Etching, Electron beam lithography, Scanning electron microscopy, Distortion, Dry etching

Proceedings Article | 28 September 2005
Proc. SPIE. 5955, Metamaterials
KEYWORDS: Metamaterials, Lithography, Electron beam lithography, Etching, Dielectrics, Silicon, Manufacturing, Nanoimprint lithography, Optics manufacturing, Dielectric polarization

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