Mr. Yifeng Shao
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Monochromatic aberrations, Point spread functions, Moire patterns, Fringe analysis, Visualization, Interferometry, Distortion, Optical metrology, 3D metrology, Projection systems, Photomasks, Zoom lenses, 3D scanning

PROCEEDINGS ARTICLE | September 25, 2014
Proc. SPIE. 9192, Current Developments in Lens Design and Optical Engineering XV
KEYWORDS: Optical design, Surface plasmons, Switching, Visualization, Imaging systems, Glasses, Complex systems, Lens design, Image quality, Optimization (mathematics)

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