Dr. Yigui Li
at Shanghai Jiao Tong Univ
SPIE Involvement:
Author
Publications (7)

SPIE Journal Paper | September 25, 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Nickel, Microfluidics, Chromium, Copper, Fabrication, Electroplating, Thin films, Semiconducting wafers, Metals, Solids

PROCEEDINGS ARTICLE | December 20, 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Fabrication, Gold, Polymers, X-rays, Silicon, Photomasks, Micromachining, Microfabrication, Beryllium, X-ray lithography

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Fabrication, Microfluidics, Polymethylmethacrylate, Blood, Polymers, Skin, X-rays, Photomasks, Helium, X-ray lithography

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Fabrication, Gold, Polymethylmethacrylate, X-rays, Laser processing, Laser ablation, Photomasks, Excimer lasers, Mask making, X-ray lithography

PROCEEDINGS ARTICLE | September 10, 2002
Proc. SPIE. 4928, MEMS/MOEMS Technologies and Applications
KEYWORDS: Optical fibers, Lithography, Silicon, Photoresist materials, Micro optics, Optical alignment, Optical switching, Fiber optic communications, Adhesives, Optics manufacturing

PROCEEDINGS ARTICLE | October 15, 2001
Proc. SPIE. 4601, Micromachining and Microfabrication Process Technology and Devices

Showing 5 of 7 publications
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