Prof. Yihua Pan Profile

Prof. Yihua Pan

at North university of China

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 22 February 2021 Poster + Paper

Fast optical proximity correction based on graph convolution network

Xu Ma, Junbi Zhang, Shengen Zhang, Rui Chen, Yihua Pan, Lisong Dong, Yayi Wei, Gonzalo Arce, ChengZhen Yu

Proceedings Volume 11613, 116130V (2021) https://doi.org/10.1117/12.2583773

KEYWORDS: Optical proximity correction, Signal processing, Convolution, Imaging systems, Systems modeling, Photomasks, Optimization (mathematics), Machine learning, Lithography, Integrated circuits

Read Abstract +

Proceedings Article | 22 February 2021 Poster + Paper

Lithography layout classification based on graph convolution network

Xu Ma, Rui Chen, Junbi Zhang, Shengen Zhang, Yihua Pan, Lisong Dong, Yayi Wei, Gonzalo Arce, Xianqiang Zheng

Proceedings Volume 11613, 116130U (2021) https://doi.org/10.1117/12.2583558

KEYWORDS: Lithography, Convolution, Signal processing, Network architectures, Image classification, Transform theory, Source mask optimization, Machine learning, Integrated circuits, Fourier transforms

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years