Dr. Yijian Chen
Research Scientist at Westlake University
SPIE Involvement:
Publications (40)

Proceedings Article | 9 April 2024 Presentation + Paper
Yijian Chen, Xinzuo Sun, Chunyan Song, Kang Wang, Jie Cao, Xijun Li
Proceedings Volume 12958, 1295802 (2024) https://doi.org/10.1117/12.3010597
KEYWORDS: Ruthenium, Nanowires, Logic devices, Back end of line

Proceedings Article | 9 April 2024 Poster + Paper
Yijian Chen, Chunyan Song, Junhua Gao, Xijun Li
Proceedings Volume 12956, 129560O (2024) https://doi.org/10.1117/12.3010567
KEYWORDS: Extreme ultraviolet lithography, Micromirrors, Extreme ultraviolet, Printing, Lithography

Proceedings Article | 22 March 2016 Paper
Ting Han, Hongyi Liu, Yijian Chen
Proceedings Volume 9777, 977718 (2016) https://doi.org/10.1117/12.2218874
KEYWORDS: Process control, Optical lithography, Etching, Lithography, Probability theory, Photomasks, Failure analysis, Phase only filters, Yield improvement, Critical dimension metrology, Error analysis

Proceedings Article | 16 March 2016 Paper
Hongyi Liu, Ting Han, Jun Zhou, Yijian Chen
Proceedings Volume 9781, 97810P (2016) https://doi.org/10.1117/12.2219082
KEYWORDS: Optical lithography, Photomasks, Etching, Manufacturing, Design for manufacturability, Metals, Array processing, Printing, Detection and tracking algorithms, Extreme ultraviolet lithography, Lithography, Algorithm development, Cadmium, Extreme ultraviolet, Chemical mechanical planarization

Proceedings Article | 16 March 2016 Paper
Jun Zhou, Yijian Chen
Proceedings Volume 9781, 97810T (2016) https://doi.org/10.1117/12.2219336
KEYWORDS: Probability theory, Design for manufacturability, Optics manufacturing, Optical lithography, Metals, Critical dimension metrology, Failure analysis, Design for manufacturing, Manufacturing, Yield improvement, Feature extraction, Statistical analysis

Showing 5 of 40 publications
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