Yijiang Shen
Student at Univ of Hong Kong
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 May 2010
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Mathematical modeling, Lithography, Monochromatic aberrations, Point spread functions, Imaging systems, Computer simulations, Photomasks, Optical proximity correction, Algorithm development, Resolution enhancement technologies

Proceedings Article | 9 February 2006
Proc. SPIE. 6070, Machine Vision Applications in Industrial Inspection XIV
KEYWORDS: Defect detection, Sensors, Image processing, Image registration, Light sources and illumination, Machine vision, Semiconductor manufacturing, Algorithm development, Statistical modeling, Single crystal X-ray diffraction

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