Ying-Chou Cheng
at National Taiwan Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Mirrors, Switches, Switching, Silica, Etching, Metals, Micromirrors, Micromachining, Demultiplexers

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Silicon, Transducers, Wave sensors, Wet etching, Zinc oxide, Acoustics, Liquids

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