Ying-Ku Joe Lin
at United Microelectronics Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Lithography, Reticles, Sensors, Calibration, Glasses, Scanners, Particles, Pellicles, Photomasks, Semiconducting wafers

Proceedings Article | 17 May 2005
Proc. SPIE. 5755, Data Analysis and Modeling for Process Control II
KEYWORDS: Lithography, Clocks, Atrial fibrillation, Sensors, Calibration, Scanners, Particles, Image sensors, Optimization (mathematics), Semiconducting wafers

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