Ying Gao
at Shanghai Integrated Circuit Research & Development Ctr Co Ltd
SPIE Involvement:
Publications (3)

SPIE Journal Paper | 29 November 2022
Xuelong Shi, Yan Yan, Chen Li, Mingyang Xia, Bingyang Pan, Ying Gao, Wei Yuan
JM3, Vol. 21, Issue 04, 043203, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.043203
KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Statistical modeling, Photomasks, Education and training, SRAF, Performance modeling, Deep convolutional neural networks, Visual process modeling

SPIE Journal Paper | 29 September 2021
Yan Yan, Xuelong Shi, Tao Zhou, Bowen Xu, Chen Li, Wei Yuan, Ying Gao, Bingyang Pan, Xuling Diao, Shoumian Chen, Yuhang Zhao
JM3, Vol. 20, Issue 04, 041204, (September 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.4.041204
KEYWORDS: Scanning electron microscopy, Data modeling, Metrology, Optical proximity correction, Machine learning, 3D modeling, Performance modeling, Image processing, Statistical modeling, Convolution

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11327, 113270B (2020) https://doi.org/10.1117/12.2552001
KEYWORDS: Etching, Metrology, Calibration, Scanning electron microscopy, Data modeling, Optical proximity correction, Critical dimension metrology, Performance modeling, Image processing, Semiconducting wafers

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