Prof. Ying Liu Profile

Prof. Ying Liu

at Univ of Science and Technology of China

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Publications (3)

Proceedings Article | 18 December 2023 Paper

Interference lithography based on a phase mask for the fabrication of diffraction gratings

Shuhu Huan, Manman Sun, Shiyang Li, Ying Liu, Yilin Hong

Proceedings Volume 12964, 129640D (2023) https://doi.org/10.1117/12.3006776

KEYWORDS: Lithography, Diffraction gratings, Fabrication, Diffraction, Etching, Photoresist materials, Reactive ion etching, Near field, Silica, Plane waves

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Proceedings Article | 24 November 2021 Paper

High-efficiency visible and near-infrared transmission gratings in fused silica for astronomical ground-based telescope spectrographs

Zhiwen Chen, Ruizhi Li, Tao Ren, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Ying Liu, Yanan Wang

Proceedings Volume 12069, 1206904 (2021) https://doi.org/10.1117/12.2601658

KEYWORDS: Diffraction gratings, Diffraction, Etching, Reactive ion etching, Telescopes, Spectrographs, Silica, Ion beams, Binary data, Holography

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Proceedings Article | 9 July 2013 Paper

Improve the laser damage resistance of fused silica by wet surface cleaning and optimized HF etch process

Xiaolong Jiang, Huanle Rao, Ying Liu, Shaojun Fu

Proceedings Volume 8786, 87860Q (2013) https://doi.org/10.1117/12.2020734

KEYWORDS: Etching, Silica, Laser induced damage, HF etching, Contamination, Metals, Polishing, Resistance, Cerium, Surface finishing

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