Ying Wu
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 22, 2009
Proc. SPIE. 7378, Scanning Microscopy 2009
KEYWORDS: Actuators, Imaging systems, Nanoparticles, Scanners, Error analysis, Inspection, Control systems, Atomic force microscopy, Scanning probe microscopy, Feedback control

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