CONFERENCE PROCEEDINGS
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Dr. Yingkai Liu
Test Engineer at Entegris Inc
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Publications (4)
Proceedings Article | 5 April 2007 Paper
Purge micro-environment with ionized air to reduce chances of ESD damages to wafers
Huaping Wang, Yingkai Liu, Mike Cisewski
Proceedings Volume 6518, 65183Y (2007) https://doi.org/10.1117/12.708055
KEYWORDS: Semiconducting wafers, Nitrogen, Ionization, Wafer testing, Reticles, Ions, Power supplies, Manufacturing, Roads, Photomasks
Proceedings Article | 6 May 2005 Paper
Polypyrrole/gold bilayer characterization
Steven Fanning, Yingkai Liu, Marc Christophersen, Matthias Duerkop, Elisabeth Smela, Benjamin Shapiro
Proceedings Volume 5759, (2005) https://doi.org/10.1117/12.599767
KEYWORDS: Gold, Actuators, Transducers, Microactuators, Microfabrication, Reactive ion etching, Etching, Biomedical optics, Surface micromachining, Electrodes
Proceedings Article | 6 May 2005 Paper
Improving adhesion of polypyrrole to gold for long-term actuation
Yingkai Liu, Qi Gan, Shermeen Baig, Elisabeth Smela
Proceedings Volume 5759, (2005) https://doi.org/10.1117/12.599753
KEYWORDS: Gold, Electrodes, Polymers, Plating, Electroplating, Scanning electron microscopy, Actuators, Interfaces, Gallium nitride, Polymeric actuators
Proceedings Article | 6 May 2005 Paper
Integrating conjugated polymer microactuators with CMOS sensing circuitry for studying living cells
Proceedings Volume 5759, (2005) https://doi.org/10.1117/12.599775
KEYWORDS: Actuators, Electrodes, Sensors, Polymers, Electroactive polymers, Packaging, Microelectromechanical systems, Dielectrophoresis, CMOS sensors, Gold
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