Dr. Yingkai Liu
Test Engineer at Entegris Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Reticles, Roads, Ions, Nitrogen, Manufacturing, Power supplies, Ionization, Photomasks, Semiconducting wafers, Wafer testing

Proceedings Article | 6 May 2005
Proc. SPIE. 5759, Smart Structures and Materials 2005: Electroactive Polymer Actuators and Devices (EAPAD)
KEYWORDS: Actuators, Gold, Electrodes, Polymers, Interfaces, Scanning electron microscopy, Gallium nitride, Plating, Electroplating, Polymeric actuators

Proceedings Article | 6 May 2005
Proc. SPIE. 5759, Smart Structures and Materials 2005: Electroactive Polymer Actuators and Devices (EAPAD)
KEYWORDS: Microelectromechanical systems, Packaging, Actuators, Gold, CMOS sensors, Sensors, Electrodes, Polymers, Dielectrophoresis, Electroactive polymers

Proceedings Article | 6 May 2005
Proc. SPIE. 5759, Smart Structures and Materials 2005: Electroactive Polymer Actuators and Devices (EAPAD)
KEYWORDS: Actuators, Gold, Biomedical optics, Etching, Electrodes, Microactuators, Transducers, Microfabrication, Reactive ion etching, Surface micromachining

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