Yingxia Jin
at Peking Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Fabrication, Resonators, Silica, Etching, Electrodes, Silicon, Numerical simulations, Capacitance, Optical simulations, Micromachining

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