A clamped-clamped beam (CC beam) in-plane capacitive resonator with 100nm gap has been analyzed and fabricated by
silicon micromachining technique in this paper. The nonlinearity effects in this device and the resonant mode of the main
structure are analyzed and the overall system dynamics of motion equation and general solution are given firstly. The
simulation results of resonant mode indicate that the structure size of the beam has great influence on the resonant
frequency of beam. Moreover, with the high aspect-ratio combined poly- and single-crystal silicon micromachining
technology (HARPSS), 100nm gap in-plane capacitive resonator has been fabricated.