The possibility of imaging objects at the resolution of smaller than the optical diffraction limit is of great interest to
nanotechnologies and biotechnologies. In this paper, we present a novel near-filed nano-imaging device based on
nanophotodetector(NPD) array, which is capable of addressing function. Multi-level Multi-electron(MLME) Finitedifference
time-domain(FDTD) method is used to simulate the performance of NPD array. The simulation shows a
highest obtainable resolution of 150nm for the light with 1.55μm wavelength. Various photolithography, e-beam
lithography and etching back techniques have been developed to realize the NPD device. Up to 4x4 slab version NPD
array with various resolutions have been successfully realized. The smallest pixel size is as small as 150nm.