Dr. Yinzhen Wang
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 20, 2005
Proc. SPIE. 5628, Semiconductor Lasers and Applications II
KEYWORDS: Polishing, Crystals, Atomic force microscopy, Raman spectroscopy, Gallium nitride, Sapphire, Raman scattering, Wet etching, Surface finishing, Chemical mechanical planarization

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