Dr. Yiqiong Zhao
Product Marketing Mgr at ASML Silicon Valley
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Metrology, Data modeling, Calibration, Etching, Image processing, Scanning electron microscopy, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Performance modeling

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Data modeling, Calibration, Scanning electron microscopy, Time metrology, Neural networks, Optical proximity correction, Semiconducting wafers, Instrument modeling

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Calibration, Error analysis, Diffusion, 3D modeling, SRAF, Photoresist processing, Semiconducting wafers, Performance modeling, Process modeling, Photo decomposable quencher

Proceedings Article | 7 February 2005 Paper
Proc. SPIE. 5636, Holography, Diffractive Optics, and Applications II
KEYWORDS: Optical design, Lithium, Diffractive optical elements, Polarization, Particles, Printing, Optical tweezers, Beam shaping, Optimization (mathematics), Algorithms

Proceedings Article | 18 October 2004 Paper
Proc. SPIE. 5514, Optical Trapping and Optical Micromanipulation
KEYWORDS: Optical design, Diffractive optical elements, Polarization, Chemical species, Particles, Physics, Wavefronts, Optical tweezers, Optimization (mathematics), Algorithms

Showing 5 of 12 publications
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