Mr. Yit Lung Khung
at Flinders Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 27, 2007
Proc. SPIE. 6799, BioMEMS and Nanotechnology III
KEYWORDS: Etching, Electrodes, Polymers, Glasses, Silicon, Coating, Chemistry, Atomic force microscopy, Scanning electron microscopy, Plasma

PROCEEDINGS ARTICLE | December 27, 2007
Proc. SPIE. 6799, BioMEMS and Nanotechnology III
KEYWORDS: Etching, Electrodes, Silicon, Chemistry, Platinum, Atomic force microscopy, Scanning electron microscopy, Infrared spectroscopy, Ozone, Semiconducting wafers

PROCEEDINGS ARTICLE | January 19, 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Diffuse reflectance spectroscopy, Etching, Glasses, Particles, Silicon, Scanning electron microscopy, Infrared spectroscopy, Solids, Sodium, UV-Vis spectroscopy

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