YoHan Ahn
at Samsung Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Reticles, Laser energy, Nitrogen, Oxygen, Pellicles, Laser scanners, Photomasks, 3D scanning, Laser bonding

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Lithography, Reticles, Air contamination, Laser energy, Pellicles, Transmittance, Photomasks, Critical dimension metrology, Semiconducting wafers, Binary data

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