Yoav Grauer
Product Marketing Manager at KLA Israel
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124963D (2023) https://doi.org/10.1117/12.2660026
KEYWORDS: Wafer bonding, Semiconducting wafers, Metrology, 3D metrology, Optical parametric oscillators, Silicon, Optical alignment, Photovoltaics, Overlay metrology, Copper

Proceedings Article | 27 April 2023 Presentation + Paper
Yonglei Li, Justin Lim, Nahee Park, Yuqian Zhang, Xiaolei Liu, Yasutaka Okada, Gloria Chen, Ben McClain, Erin Hollinger, Amy Weatherly, Yoav Grauer, Zephyr Liu, Raviv Yohanan, Greg Gray, Mark Stakely, Shlomit Katz, Mahendra Dubey, Neeraj Khanna
Proceedings Volume 12496, 124960R (2023) https://doi.org/10.1117/12.2658074
KEYWORDS: Design and modelling, Metrology, Overlay metrology, Process control, Inspection, Optical lithography, Imaging metrology, Semiconductors, Moire patterns

Proceedings Article | 27 April 2023 Poster + Presentation + Paper
Shlomit Katz, Nikhil Aditya Kumar Roy, Steve McCandless, Jason Reece, Nathan Gillespie, Nils Monserud, Yoav Grauer, Mark Stakely, Greg Gray, Yonglei Li, Peter Kimani, Nahee Park, Iwata Yasuhisa, Imura Koichi, Ito Kosuke, Yuqian Zhang
Proceedings Volume 12496, 1249613 (2023) https://doi.org/10.1117/12.2655161
KEYWORDS: Near infrared, Opacity, Metrology, 3D metrology, Photoresist processing, Overlay metrology, Image processing, Etching, Optical gratings

Proceedings Article | 26 May 2022 Presentation + Paper
Shlomit Katz, Yoav Grauer, Efi Megged
Proceedings Volume 12053, 120530N (2022) https://doi.org/10.1117/12.2605863
KEYWORDS: Overlay metrology, Metrology, Semiconducting wafers, 3D metrology, Semiconductors, Opacity, Optical parametric oscillators, Infrared imaging, 3D acquisition, Photoresist processing

Proceedings Article | 26 May 2022 Paper
Yoav Grauer, Andy Miller, Douglas Charles La Tulipe, Amnon Manassen, Shlomo Eisenbach, Ohad Bachar, Roel Gronheid
Proceedings Volume 12053, 120530D (2022) https://doi.org/10.1117/12.2608319
KEYWORDS: Semiconducting wafers, Metrology, Wafer bonding, Silicon, 3D metrology, Packaging, Optical alignment

Showing 5 of 16 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top