Dr. Yoel Cohen
Head of R&D at AdOM optical technologies Ltd.
SPIE Involvement:
Publications (5)

Proceedings Article | 23 March 2009 Paper
Alok Vaid, Carsten Hartig, Matthew Sendelbach, Cornel Bozdog, Hyang Kyun Kim, Michael Sendler, Yoel Cohen, Victor Kucherov, Boaz Brill, Stanislav Stepanov
Proceedings Volume 7272, 72720V (2009) https://doi.org/10.1117/12.814380
KEYWORDS: Scatterometry, Material characterization, Optical properties, Semiconducting wafers, Metals, Critical dimension metrology, Etching, Silicon, Metrology, Wafer-level optics

Proceedings Article | 9 April 2008 Paper
Yoel Cohen, Barak Yaakobovitz, Yoed Tsur, David Scheiner
Proceedings Volume 6922, 692220 (2008) https://doi.org/10.1117/12.772117
KEYWORDS: Line edge roughness, Scatterometry, Calibration, Scatter measurement, Process control, Photoresist materials, Signal to noise ratio, Edge roughness, Scanning electron microscopy, Structural design

Proceedings Article | 16 July 2002 Paper
Boaz Brill, Yoel Cohen, Igor Turovets, Dario Elyasy, Tzevi Beatus
Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473521
KEYWORDS: Scatterometry, Semiconducting wafers, Process control, Finite element methods, Diffraction, Neural networks, Lithography, Data modeling, Cadmium sulfide, Metrology

Proceedings Article | 16 July 2002 Paper
Vladimir Machavariani, Shahar Garber, Yoel Cohen
Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473456
KEYWORDS: Scatterometry, Lithography, Photoresist materials, Time metrology, Metrology, Electromagnetic simulation, Process control, Error analysis, Semiconducting wafers, Dielectric polarization

Proceedings Article | 2 June 2000 Paper
Yoel Cohen, Ori Braitbart
Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386527
KEYWORDS: Semiconducting wafers, Reflectivity, Oxides, Lithography, Photoresist materials, Critical dimension metrology, Chemical mechanical planarization, Chemical vapor deposition, Wafer-level optics, Polishing

  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top