Yogesh M. Mardikar
at West Virginia Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 11 November 2004
Proc. SPIE. 5605, Intelligent Systems in Design and Manufacturing V
KEYWORDS: Semiconductors, Oxides, Chemical species, Silicon, Doping, Semiconductor manufacturing, Intelligence systems, Semiconducting wafers, Process modeling, Oxidation

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