Yong-Hyun Lim
at SK Hynix Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 3 April 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Error analysis, Silicon, Distortion, Process control, Semiconductor manufacturing, Nanoimprint lithography, Optical alignment, Semiconducting wafers, Overlay metrology

Proceedings Article | 21 March 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Logic, Optical lithography, Ultraviolet radiation, Particles, Coating, Manufacturing, High volume manufacturing, Nanoimprint lithography, Photoresist processing, Semiconducting wafers, Defect inspection

Proceedings Article | 5 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Semiconductors, Carbon, Metrology, Optical lithography, Wafer inspection, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Overlay metrology, Temperature metrology

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Oxides, Ions, Silicon, Gases, Diffusion, Photoresist materials, Silicon films, Chemical reactions, Semiconducting wafers, Photoresist developing

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