Dr. Yong Jin Cho
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 11 December 2009 Paper
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Reticles, Optical lithography, Image segmentation, Scanners, Complex systems, Control systems, Distortion, Double patterning technology, Overlay metrology, Nonlinear control

Proceedings Article | 4 March 2008 Paper
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Data modeling, Calibration, Image processing, Feature extraction, Image analysis, Scanning electron microscopy, Optical proximity correction, Critical dimension metrology, Optical calibration, Process modeling

Proceedings Article | 20 May 2006 Paper
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Statistical analysis, Argon, Air contamination, Ions, Oxygen, Pellicles, Photomasks, Chemical analysis, Fluorine, Carbon monoxide

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