Dr. Yong Kwan Kim
at Apple Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 October 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Photoresist processing, Photomasks, Electron beams, Manufacturing, Line edge roughness, Electron beam lithography, Semiconducting wafers, Laser phosphor displays, Lithography, Etching

Proceedings Article | 25 September 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Laser phosphor displays, Etching, Backscatter, SRAF, Electron beams, Line edge roughness, Photomasks, Manufacturing, Inspection, Image quality

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