Mr. Yong Min Kim Profile

Yong Min Kim

at KAIST

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Publications (1)

Proceedings Article | 22 December 2015 Paper

Surface plasmon interference lithography using Al grating structure on glass

Yong Min Kim, Kyung Cheol Choi

Proceedings Volume 9668, 96682D (2015) https://doi.org/10.1117/12.2202516

KEYWORDS: Surface plasmons, Aluminum, Optical lithography, Lithography, Diffraction gratings, Nanolithography, Glasses, Line edge roughness, Semiconductors, Diffraction, Metals, Dielectrics, Device simulation

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