A kind of photoactive polymer with diazoketo groups in its side chains has been reported in SPIE and other related
papers, and this photoactive polymer can be used in deep UV non-CARs (non-chemically amplified resists) system.
Based on the work above, a series of novel photoactive monomers with substituents like phenyl, p-methylphenyl,
p-methoxyphenyl, p-dimethylaminophenyl on the end of the molecule are designed and synthesized. By changing their
substituents, the maximum-absorption wavelength of the photoactive monomers has been moved to 356nm, and it still
has comparatively large absorption at 365nm (I-line). A series of photoactive polymers were obtained by polymerizing
the monomer with methyl methacrylate and 2-hydroxyethyl methacrylate together. Upon irradiaton in the waveleng of
365nm, the diazoketo groups which are in the side chains of the photoactive polymers undergo the wolff rearrangment
and afford ketens that react with water to provide base-soluble photoproducts. Applying this kind of photoactive
polymers to non-CARs, a positive image can be obtained. This kind of photoactive polymers have great value in I-line
non-CARs, TFT-LCD and IC discrete devices processing. And its anti-dry etching ability is enhanced by the introduction
of the benzene ring.
With the development of construction of China Cities, there exist a lot of environmental geological problems involved in the geofracture, land subsidence, collapse, landslide, devolution, mudrock flow, floating sand, piping and soft ground deformation. Of big cities whose population is over one million in China, about 30 cities appears the land subsidence region. Other cities locate in the regions of collapse yellow earth or expand soil of strong swell-shrink charasteristic, soft ground and karst. In the paper, the cause and hazard of regionality ground deformation is summed up. The causes of regional land deformation caused by the natural geological effect and activities of human being are analyzed. According to the length of deformation course and endanger of society, economy and life, land deformation involves three types, that is, the delay, rapid and break land deformation. And the concrete countermeasure and method are provided.