Dr. Yong Wang
Manager at JSR Engineering Co Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 11, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Refractive index, Prisms, Water, Ultraviolet radiation, Laser irradiation, Photoresist materials, Transmittance, Absorbance, Immersion lithography, Absorption

PROCEEDINGS ARTICLE | April 11, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Refractive index, Microfluidics, Water, Photoresist materials, Transmittance, Absorbance, Immersion lithography, Semiconducting wafers, 193nm lithography

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Refractive index, Transparency, Water, Ultraviolet radiation, Interferometry, Photoresist materials, Transmittance, Immersion lithography, Semiconducting wafers

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