Dr. Yong Wang
Manager at JSR Engineering Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 11 April 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Refractive index, Water, Immersion lithography, Ultraviolet radiation, Absorbance, Laser irradiation, Absorption, Photoresist materials, Transmittance, Prisms

Proceedings Article | 11 April 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Photoresist materials, Lithography, Refractive index, Semiconducting wafers, Immersion lithography, Microfluidics, Absorbance, Transmittance, 193nm lithography, Water

Proceedings Article | 4 May 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Refractive index, Photoresist materials, Water, Immersion lithography, Ultraviolet radiation, Lithography, Transmittance, Semiconducting wafers, Interferometry, Transparency

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