Planar integrated antenna has special advantages in Terahertz application, but with disadvantage of low gain. In this
paper, a novel Terahertz integrated horn antenna operating at 0.9 THz was proposed in order to enhance the radiation
performance of planar integrated antenna elements. The processing of this type horn antenna combine two kind MEMS
techniques, silicon dry etching and silicon wet etching. The structure of the horn includes two parts, pyramid horn back
cavity and octagonal horn front cavity. FEM (Finite Element Method) is used to analyze the performances of antenna.
The main superiority of this kind integrated horn antenna is that it has more tunable parameters than other type MEMSbased
integrated antennas. High performance Terahertz antenna elements can be obtained by synthesizing the parameters
of the horn.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.