Self-aligned blocking integration demonstration for critical sub-30nm pitch Mx level patterning with EUV self-aligned double patterning
Electrical study of DSA shrink process and CD rectification effect at sub-60nm using EUV test vehicle
Design technology co-optimization assessment for directed self-assembly-based lithography: design for directed self-assembly or directed self-assembly for design?
Directed self assembly on resist-limited guiding patterns for hole grapho-epitaxy: Can DSA help lower EUV's source power requirements?
Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography