Dr. Yongfu Li
at GLOBALFOUNDRIES Singapore Pte Ltd
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Semiconductors, Lithography, Mirrors, Lithium, Manufacturing, Printing, Photomasks, Transistors, Double patterning technology, Analog electronics

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Manufacturing, Integrated circuits, Algorithm development, Integrated circuit design, Design for manufacturability

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Oxides, Metrology, Data modeling, Calibration, Metals, Silicon, Manufacturing, Chemical mechanical planarization, Back end of line, Front end of line

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Semiconductors, Lithium, Capacitors, Databases, Metals, Error analysis, Silicon, Manufacturing, Transistors, Resistors, Analog electronics, Digital electronics, System on a chip, New and emerging technologies

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Data modeling, Calibration, Etching, Metals, Copper, Silicon, Manufacturing, Design for manufacturing, Semiconducting wafers, Product engineering, Chemical mechanical planarization, Back end of line, Design for manufacturability

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