Dr. Yonghong Yang
R&D Engineer at Seagate Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Electron beam lithography, Deep ultraviolet, Metals, Photomasks, Optical proximity correction, Error control coding, Semiconducting wafers, Binary data, Laser systems engineering

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