YongKyoo Choi
Executive Manager
SPIE Involvement:
Publications (32)

Proceedings Article | 20 March 2009 Paper
Proceedings Volume 7271, 727144 (2009) https://doi.org/10.1117/12.814364
KEYWORDS: Extreme ultraviolet, Critical dimension metrology, Extreme ultraviolet lithography, Semiconducting wafers, Lithography, Photomasks, Scanning electron microscopy, Wafer testing, Silicon, Light scattering

Proceedings Article | 17 October 2008 Paper
Proceedings Volume 7122, 712239 (2008) https://doi.org/10.1117/12.801432
KEYWORDS: Critical dimension metrology, Photomasks, Semiconducting wafers, Quartz, Control systems, Printing, Refractive index, Laser scattering, Optical lithography, Ultrafast lasers

Proceedings Article | 19 May 2008 Paper
Yongkyoo Choi, Sunghyun Oh, Munsik Kim, Yongdae Kim, Changreol Kim
Proceedings Volume 7028, 70281O (2008) https://doi.org/10.1117/12.793065
KEYWORDS: Critical dimension metrology, Semiconducting wafers, Photomasks, Scanning electron microscopy, Transmittance, Spatial filters, Image filtering, Image enhancement, Image processing, Error analysis

Proceedings Article | 19 May 2008 Paper
Proceedings Volume 7028, 70282B (2008) https://doi.org/10.1117/12.793085
KEYWORDS: Air contamination, Photomasks, Raman spectroscopy, Packaging, Explosives, Inspection, Reticles, Pellicles, Ultraviolet radiation, Organic materials

Proceedings Article | 19 May 2008 Paper
Proceedings Volume 7028, 70281U (2008) https://doi.org/10.1117/12.799668
KEYWORDS: Carbon, Photomasks, Extreme ultraviolet lithography, Contamination, Extreme ultraviolet, Reflectivity, Analytical research, Lithography, Raman spectroscopy, Scanning probe microscopy

Showing 5 of 32 publications
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