Dr. Yonglei Li
at KLA Corporation
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 27 April 2023 Presentation + Paper
Xiaolei Liu, Zephyr Liu, Yonglei Li, Justin Lim, Nahee Park, Yuqian Zhang, Yasutaka Okada, Gloria Chen, Ben McClain, Erin Hollinger, Amy Weatherly, Yoav Grauer, Raviv Yohanan, Greg Gray, Mark Stakely, Shlomit Katz, Mahendra Dubey, Neeraj Khanna
Proceedings Volume 12496, 124960R (2023) https://doi.org/10.1117/12.2658074
KEYWORDS: Design and modelling, Metrology, Overlay metrology, Process control, Inspection, Optical lithography, Imaging metrology, Semiconductors, Moire patterns

Proceedings Article | 27 April 2023 Poster + Presentation + Paper
Shlomit Katz, Yoav Grauer, Mark Stakely, Greg Gray, Peter Kimani, Nahee Park, Yuqian Zhang, Yonglei Li, Nikhil Aditya Kumar Roy, Nils Monserud, Steve McCandless, Jason Reece, Nathan Gillespie, Iwata Yasuhisa, Imura Koichi, Ito Kosuke
Proceedings Volume 12496, 1249613 (2023) https://doi.org/10.1117/12.2655161
KEYWORDS: Near infrared, Opacity, Metrology, 3D metrology, Photoresist processing, Overlay metrology, Image processing, Etching, Optical gratings

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11611, 1161133 (2021) https://doi.org/10.1117/12.2583831
KEYWORDS: Metrology, Optical parametric oscillators, Overlay metrology, Imaging metrology, 3D metrology, 3D acquisition

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