On the basis of theoretical analysis of biaxial birefringent thin films, this study investigates the optical
properties of phase shift on reflection and/or transmission through slanted columnar TiO2 sculptured
anisotropic thin film (ATF) deposited with glancing angle deposition (GLAD) technique via reactive
electron-beam evaporation. The tilted nanocolumn microstructures of thin film induce the optical
anisotropy. The optical constants dispersion equations of TiO2 ATF are determined from fitting the
transmittance spectra for s- and p-polarized waves measured at normal and oblique incidence within
400-1200nm. With the extracted structure parameters, the phase shifts of polarized light are analyzed
with the characteristic matrix and then measured with spectroscopic ellipsometry in the deposition
plane. A reasonably good agreement between the theoretical studies and experimental measurements is
obtained. In addition, the dependence of the phase shift on oblique incidence angle is also discussed.
The results show a greater generality and superiority of the characteristic matrix method. Birefringence
of the biaxial ATF performed a sophisticated phase modulation with varied incidence angles over a
broad range to have a wide-angle phase shift.