Superhard protective antireflection Diamond-like carbon (DLC) film, consisting of a-C:H/ta-C, was fabricated using the combination of Plasma Enhanced Chemical Vapor Deposition (PECVD) and Filtered Cathodic Vacuum Arc (FCVA). The structure of a-C:H/ta-C film was analyzed by Raman, XPS, SEM, Infrared spectroscopy. Comparing with the conventional protective antireflection a-C:H film, a-C:H/ta-C film presents much higher nanohardness (52.82GPa), greatly enhanced wear resistance and unreduced infrared transmittance in 8~12μm waveband.
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