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Yongwoo Lee
at Samsung Display Co., Ltd.
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Publications (1)
Proceedings Article | 23 March 2020
A physics-driven complex valued neural network (CVNN) model for lithographic analysis
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Optical transfer functions, Data modeling, Image processing, Diffusion, Image resolution, Neural networks, Photomasks, Machine learning, Performance modeling
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