Dr. YoongHee Na
at Korea Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Semiconductors, Oxides, Silica, Etching, Polymers, Dielectrics, Silicon, Manufacturing, Resistance, Plasma

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